· The AutomationDirect PLC comes with an auto-manual station that is key-accessed so it can only be used by authorized personnel. The switches on the auto-manual station allow valves to be turned on and off; allow the diffusion pump heat to be turned on and off; and, provide a means to operate the furnace manually for either special testing or diagnostics.
· All new graphite rigid board hot zone – This vacuum furnace has 2” of new rigid board graphite insulation.
· All new graphite heating elements
· Four-sided heating elements running front-to-back for optimum temperature uniformity. Each heating element is easily replaceable. There are two graphite nuts holding each heating element in place.
· All new graphite hearth plate: Runs the length of the furnace, front-to-back. It can easily support in excess of 50 pounds, evenly distributed.
· Mechanical vacuum pump. This pump has been remanufactured and has a new charge of mechanical pump oil installed in it. The mechanical pump is mounted on vibration isolators and attached to the furnace frame.
· High-speed 6" diffusion pump. This pump has been remanufactured and has a new 480 volt heater and a new charge of diffusion pump oil installed in it.
· All new self-contained feed and drain water manifolds are mounted on the furnace frame and accessible from the rear of the furnace. The furnace is completely water-plumbed with all-new hoses and fittings.
· This furnace comes with a new chamber overtemperature-overpressure safety relief valve. The outlet of this valve is plumbed to a hose coming out the rear of the furnace.
· Digital vacuum gauge. This gauge has two thermocouple inputs – one to monitor chamber pressure and one to monitor foreline pressure. It also has an ionization gauge to monitor high vacuum in the chamber. The thermocouple gauge tubes and ionization gauge tubes are new.
· Thermocouple – This unit comes with a new inconel-sheathed dual Type “K” high temperature thermocouple probe to sense temperature in the furnace. Other probes are available for an additional charge.
· Backfill gas – This furnace is equipped with metal lines that have been helium leak tested to 10-9 scale to minimize any potential contamination that may come from contaminated backfill gases.
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